I-WVCP6000 yoMphunga waManzi iCryopump yeCryogenic Refrigeration Systems

WVCP6000 Umphunga Wamanzi Cryopump Cryogenic Refrigeration Systems Umfanekiso ofakiweyo

Inkcazelo emfutshane:

I-Fast Defrost
Umgibe obandayo upholiswe ukuya ku -135℃
Yehlisa Amaxesha okumpompa nge-25% ukuya kwi-50%
Ukusetyenziswa kwamandla aphantsi
Ubuncinci bempembelelo yokusingqongileyo, ngaphandle kweCFC kunye neeHCFCs

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Ingcaciso yeMveliso

I-Guangzhou Xieyi Automation Technology Co., Ltd., esekwe ngo-2011, lishishini elikhethekileyo lobugcisa obuphezulu eMzantsi China elibandakanyeka kuphuhliso lophando, imveliso, ukubonisana nobugcisa kunye nenkonzo yeempompo zokubamba umphunga wamanzi obushushu obuphantsi kakhulu kunye nezinye. izixhobo zobushushu obuphantsi kakhulu.

XIEYI WVCP Cryochillers zivaliwe loop cryogenic refrigeration iinkqubo ezibonelela 550 watts ~ 6,000 watts okupholisa.Ezi cryochillers zingasetyenziselwa ukubamba umphunga wamanzi kunye nezinye izinto ezicondensablekayo ngokuzikhenkceza kwindawo ebandayo efana ne-Meissner coil (cryocoil).I-WVCP cryochillers zikwasetyenziselwa ukupholisa izinto ezinjengee-electrostatic chucks ezisetyenziswa kwi-semiconductor wafer processing.

IParameter yobuGcisa

Umzekelo	WVCP6000-SH	WVCP6000-DH
Ubukhulu bomthamo wokupholisa (W)	6000	6000
Ithiyori isantya esiphezulu sokumpompa i-tubular trap ebandayo (L/S)	588000	588000
Ithiyori isantya esiphezulu sepleyiti ebandayo yomgibe (L/S)	882000	882000
Ivacuum yokugqibela (mbar)	2*10-8	2*10-8
Ixesha lokunyibilikisa kweyona ndawo ibandayo yomgibe (min)	<5	<5
Uluhlu oluhlengahlengiswayo lobushushu bobushushu (℃)	-20 ~ 30	-20 ~ 30
Imo yokulawula uxinzelelo	Isivamvo seDijithali+Ukutshintsha komatshini	Isivamvo seDijithali+Ukutshintsha komatshini
Ukubuyisela ngokukhawuleza umsebenzi woxinzelelo lokulinganisela (QRBP)	Ewe	Ewe
Umsebenzi wobungqina bokuvalwa kwe-oyile (OBP)	Ewe	Ewe
4G Ulawulo olukude	Ewe	Ewe
Iimpawu zeendaba ezibandayo	Pro-esingqongileyo	Pro-esingqongileyo
Uwona mmandla mkhulu womphezulu womgibe obandayo (㎡)	4	4
Eyona ndawo iphezulu yepleyiti yomgibe obandayo(㎡)	6	6
Ukuchazwa komgibe omnye obandayo(㎡)	φ16mm*80m	/
Ukuchazwa komgibe obandayo ophindwe kabini(㎡)	/	2φ16mm40m
Ujongano lwerhasi	12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho)	12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho)
Ujongano lwerhasi	ParkerCPI/VCR(Ngokuzikhethela)	ParkerCPI/VCR(Ngokuzikhethela)
Ukuhamba kwamanzi okupholisa (L/Umzuzu ku-24℃)	48	48
Ubushushu be-alam yokupholisa yamanzi (℃)	38	38
Inqaba yokupholisa	Ewe	Ewe
Isidibanisi samanzi okupholisa(L/S)	G1”	G1”
Amandla omthwalo omkhulu(kW)	25.3	25.3
Amandla eCompressor igama (HP)	20	20
Ubonelelo lwamandla (50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Ubonelelo lwamandla (50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Ubungakanani(MM)	935(L)873(D)1809(H)	1235(L)873(D)1809(H)
Ubunzima(KG)	655	655