WVCP3000 Umphunga Wamanzi Iinkqubo ze-Cryogenic ze-Cryogenic Refrigeration

WVCP3000 Umphunga Wamanzi Cryopump Cryogenic Refrigeration Systems Umfanekiso ofakiweyo

Inkcazelo emfutshane:

I-Fast Defrost
Umgibe obandayo upholiswe ukuya ku -135℃
Yehlisa Amaxesha okumpompa nge-25% ukuya kwi-50%
Ukusetyenziswa kwamandla aphantsi
Ubuncinci bempembelelo yokusingqongileyo, ngaphandle kweCFC kunye neeHCFCs

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Ingcaciso yeMveliso

I-Guangzhou Xieyi Automation Technology Co., Ltd., esekwe ngo-2011, lishishini elikhethekileyo lobugcisa obuphezulu eMzantsi China elibandakanyeka kuphuhliso lophando, imveliso, ukubonisana nobugcisa kunye nenkonzo yeempompo zokubamba umphunga wamanzi obushushu obuphantsi kakhulu kunye nezinye. izixhobo zobushushu obuphantsi kakhulu.

XIEYI WVCP Cryochillers zivaliwe loop cryogenic refrigeration iinkqubo ezibonelela 550 watts ~ 6,000 watts okupholisa.Ezi cryochillers zingasetyenziselwa ukubamba umphunga wamanzi kunye nezinye izinto ezicondensablekayo ngokuzikhenkceza kwindawo ebandayo efana ne-Meissner coil (cryocoil).I-WVCP cryochillers zikwasetyenziselwa ukupholisa izinto ezinjengee-electrostatic chucks ezisetyenziswa kwi-semiconductor wafer processing.

IParameter yobuGcisa

Umzekelo	WVCP3000-SH	WVCP3000-DH
Ubukhulu bomthamo wokupholisa (W)	3000	3000
Ithiyori isantya esiphezulu sokumpompa i-tubular trap ebandayo (L/S)	249900	249900
Ithiyori isantya esiphezulu sepleyiti ebandayo yomgibe (L/S)	352800	352800
Ivacuum yokugqibela (mbar)	2*10-8	2*10-8
Ixesha lokunyibilikisa kweyona ndawo ibandayo yomgibe (min)	<3	<3
Uluhlu oluhlengahlengiswayo lobushushu bobushushu (℃)	-20 ~ 30	-20 ~ 30
Imo yokulawula uxinzelelo	Isivamvo seDijithali+Ukutshintsha komatshini	Isivamvo seDijithali+Ukutshintsha komatshini
Ukubuyisela ngokukhawuleza umsebenzi woxinzelelo lokulinganisela (QRBP)	Ewe	Ewe
Umsebenzi wobungqina bokuvalwa kwe-oyile (OBP)	Ewe	Ewe
4G Ulawulo olukude	Ewe	Ewe
Iimpawu zeendaba ezibandayo	Pro-esingqongileyo	Pro-esingqongileyo
Uwona mmandla mkhulu womphezulu womgibe obandayo (㎡)	1.7	1.7
Eyona ndawo iphezulu yepleyiti yomgibe obandayo(㎡)	2.4	2.4
Ukuchazwa komgibe omnye obandayo(㎡)	φ16mm*34m	/
Ukuchazwa komgibe obandayo ophindwe kabini(㎡)	/	2φ16mm17m
Ujongano lwerhasi	12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho)	12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho)
Ujongano lwerhasi	ParkerCPI/VCR(Ngokuzikhethela)	ParkerCPI/VCR(Ngokuzikhethela)
Ukuhamba kwamanzi okupholisa (L/Umzuzu ku-24℃)	28	28
Ubushushu be-alam yokupholisa yamanzi (℃)	38	38
Inqaba yokupholisa	Ewe	Ewe
Isidibanisi samanzi okupholisa(L/S)	G3/4	G3/4
Amandla omthwalo omkhulu(kW)	16.5	16.5
Amandla eCompressor igama (HP)	10	10
Ubonelelo lwamandla (50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Ubonelelo lwamandla (50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Ubungakanani(MM)	935(L)873(D)1809(H)	935(L)873(D)1809(H)
Ubunzima(KG)	480	480