WVCP3000 Umphunga Wamanzi Iinkqubo ze-Cryogenic ze-Cryogenic Refrigeration
Ingcaciso yeMveliso
I-Guangzhou Xieyi Automation Technology Co., Ltd., esekwe ngo-2011, lishishini elikhethekileyo lobugcisa obuphezulu eMzantsi China elibandakanyeka kuphuhliso lophando, imveliso, ukubonisana nobugcisa kunye nenkonzo yeempompo zokubamba umphunga wamanzi obushushu obuphantsi kakhulu kunye nezinye. izixhobo zobushushu obuphantsi kakhulu.
XIEYI WVCP Cryochillers zivaliwe loop cryogenic refrigeration iinkqubo ezibonelela 550 watts ~ 6,000 watts okupholisa.Ezi cryochillers zingasetyenziselwa ukubamba umphunga wamanzi kunye nezinye izinto ezicondensablekayo ngokuzikhenkceza kwindawo ebandayo efana ne-Meissner coil (cryocoil).I-WVCP cryochillers zikwasetyenziselwa ukupholisa izinto ezinjengee-electrostatic chucks ezisetyenziswa kwi-semiconductor wafer processing.
IParameter yobuGcisa
Umzekelo | WVCP3000-SH | WVCP3000-DH |
Ubukhulu bomthamo wokupholisa (W) | 3000 | 3000 |
Ithiyori isantya esiphezulu sokumpompa i-tubular trap ebandayo (L/S) | 249900 | 249900 |
Ithiyori isantya esiphezulu sepleyiti ebandayo yomgibe (L/S) | 352800 | 352800 |
Ivacuum yokugqibela (mbar) | 2*10-8 | 2*10-8 |
Ixesha lokunyibilikisa kweyona ndawo ibandayo yomgibe (min) | <3 | <3 |
Uluhlu oluhlengahlengiswayo lobushushu bobushushu (℃) | -20 ~ 30 | -20 ~ 30 |
Imo yokulawula uxinzelelo | Isivamvo seDijithali+Ukutshintsha komatshini | Isivamvo seDijithali+Ukutshintsha komatshini |
Ukubuyisela ngokukhawuleza umsebenzi woxinzelelo lokulinganisela (QRBP) | Ewe | Ewe |
Umsebenzi wobungqina bokuvalwa kwe-oyile (OBP) | Ewe | Ewe |
4G Ulawulo olukude | Ewe | Ewe |
Iimpawu zeendaba ezibandayo | Pro-esingqongileyo | Pro-esingqongileyo |
Uwona mmandla mkhulu womphezulu womgibe obandayo (㎡) | 1.7 | 1.7 |
Eyona ndawo iphezulu yepleyiti yomgibe obandayo(㎡) | 2.4 | 2.4 |
Ukuchazwa komgibe omnye obandayo(㎡) | φ16mm*34m | / |
Ukuchazwa komgibe obandayo ophindwe kabini(㎡) | / | 2*φ16mm*17m |
Ujongano lwerhasi | 12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho) | 12.7 isiphambuka esidityanisiweyo sobhedu(Umgangatho) |
ParkerCPI/VCR(Ngokuzikhethela) | ParkerCPI/VCR(Ngokuzikhethela) | |
Ukuhamba kwamanzi okupholisa (L/Umzuzu ku-24℃) | 28 | 28 |
Ubushushu be-alam yokupholisa yamanzi (℃) | 38 | 38 |
Inqaba yokupholisa | Ewe | Ewe |
Isidibanisi samanzi okupholisa(L/S) | G3/4 | G3/4 |
Amandla omthwalo omkhulu(kW) | 16.5 | 16.5 |
Amandla eCompressor igama (HP) | 10 | 10 |
Ubonelelo lwamandla (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
200-230V AC 3P(L) | 200-230V AC 3P(L) | |
Ubungakanani(MM) | 935(L)*873(D)*1809(H) | 935(L)*873(D)*1809(H) |
Ubunzima(KG) | 480 | 480 |