Itekhnoloji yokucoca ivacuum

Itekhnoloji yokugquma ivacuum, ekwabizwa ngokuba yitekhnoloji yefilimu ebhityileyo, isetyenziswa kumashishini ahlukeneyo, anje ngefoyile zokupakisha ezitsha kwishishini lokutya, iifilimu zokukhusela ukubola, ukuveliswa kweeseli zelanga, ukuhombisa izixhobo zokuhlambela kunye nobucwebe. , ukubalula ezimbalwa.

Imakethi yezixhobo zokugquma ivacuum yahlulwe ngokwesiseko sosetyenziso, itekhnoloji kunye nommandla.Ngokwetekhnoloji, imakethi iphinde yahlulahlulwe yaba yi-chemical vapor deposition (CVD), ukubekwa komphunga womzimba (ngaphandle kokutshiza), kunye nokutshiza.

Inxalenye yokubeka umphunga wenyama yahlulwe yaba ngumphunga kunye nabanye (i-pulsed laser, i-arc laser, njl.).Icandelo lomphunga kulindeleke ukuba libonise ukwanda okubonakalayo kumda wexesha lophando ngenxa yokukhula okunyukayo kweshishini le-semiconductor.

Ngaphantsi kwe-sputtering, imarike yahlulahlulwe kwi-reactive sputtering, i-magnetron sputtering (i-RF magnetron sputtering, njl. (i-pulsed DC, i-HIPIMS, i-DC, njl.)) kunye nezinye (ii-RF diodes, i-ion beams, njl.).

Intsimi ye-magnetron sputtering ikhula ngokuthe ngcembe, iqhutywa yimizila efanelekileyo enxulumene nokuvelisa kunye ne-electronics.

Ngokwesicelo, imakethi yahlulwe kwizicelo zeCVD, izicelo zePVD, kunye nezicelo zokutshiza.Ngaphantsi kwesicelo sePVD, intengiso iphinda yahlulwe kwizixhobo zonyango, i-microelectronics, izixhobo zokusika, ukugcinwa, amandla elanga kunye nabanye.Icandelo lokugcina kulindeleke ukuba libone ukukhula okunenzuzo ngexesha lohlalutyo ngenxa yokunyuka kwemfuno yokugcina kunye nokuthandwa okukhulayo kwee-SSD.

Ezinye izicelo ze-PVD zibandakanya amacandelo e-aerospace, amacandelo eemoto, ukupakishwa, kunye nokunye.

Ngaphantsi kosetyenziso lwe-sputtering, imakethi yahlulwe yaba ziifilimu zemagneti, izinzwa zegesi, i-metallization ye-microelectronic circuits kunye ne-chip carriers, iifilimu ezinganyangekiyo ku-corrosion, iifilimu ezichasayo, izixhobo zokugcina ukukhanya, njl.

Ngaphantsi kwesicelo seCVD, imarike yahlulahlulwe yaba yipolymer, isekethe edibeneyo (IC) kunye nezixhobo ze-photovoltaic, kunye nezakhelo zetsimbi (ukugcinwa kwegesi, i-adsorption, ukugcinwa kunye nokucocwa, ukuva igesi kunye ne-low-k dielectrics, i-catalysis, njl.) .

iteknoloji


Ixesha lokuposa: May-12-2022