Itekhnoloji yokugquma ivacuum, ekwabizwa ngokuba yitekhnoloji yefilimu ebhityileyo, isetyenziswa kumashishini ahlukeneyo, anje ngefoyile zokupakisha ezitsha kwishishini lokutya, iifilimu zokukhusela ukubola, ukuveliswa kweeseli zelanga, ukuhombisa izixhobo zokuhlambela kunye nobucwebe. , ukubalula ezimbalwa.
Imakethi yezixhobo zokugquma ivacuum yahlulwe ngokwesiseko sosetyenziso, itekhnoloji kunye nommandla.Ngokwetekhnoloji, imakethi iphinde yahlulahlulwe yaba yi-chemical vapor deposition (CVD), ukubekwa komphunga womzimba (ngaphandle kokutshiza), kunye nokutshiza.
Inxalenye yokubeka umphunga wenyama yahlulwe yaba ngumphunga kunye nabanye (i-pulsed laser, i-arc laser, njl.).Icandelo lomphunga kulindeleke ukuba libonise ukwanda okubonakalayo kumda wexesha lophando ngenxa yokukhula okunyukayo kweshishini le-semiconductor.
Ngaphantsi kwe-sputtering, imarike yahlulahlulwe kwi-reactive sputtering, i-magnetron sputtering (i-RF magnetron sputtering, njl. (i-pulsed DC, i-HIPIMS, i-DC, njl.)) kunye nezinye (ii-RF diodes, i-ion beams, njl.).
Intsimi ye-magnetron sputtering ikhula ngokuthe ngcembe, iqhutywa yimizila efanelekileyo enxulumene nokuvelisa kunye ne-electronics.
Ngokwesicelo, imakethi yahlulwe kwizicelo zeCVD, izicelo zePVD, kunye nezicelo zokutshiza.Ngaphantsi kwesicelo sePVD, intengiso iphinda yahlulwe kwizixhobo zonyango, i-microelectronics, izixhobo zokusika, ukugcinwa, amandla elanga kunye nabanye.Icandelo lokugcina kulindeleke ukuba libone ukukhula okunenzuzo ngexesha lohlalutyo ngenxa yokunyuka kwemfuno yokugcina kunye nokuthandwa okukhulayo kwee-SSD.
Ezinye izicelo ze-PVD zibandakanya amacandelo e-aerospace, amacandelo eemoto, ukupakishwa, kunye nokunye.
Ngaphantsi kosetyenziso lwe-sputtering, imakethi yahlulwe yaba ziifilimu zemagneti, izinzwa zegesi, i-metallization ye-microelectronic circuits kunye ne-chip carriers, iifilimu ezinganyangekiyo ku-corrosion, iifilimu ezichasayo, izixhobo zokugcina ukukhanya, njl.
Ngaphantsi kwesicelo seCVD, imarike yahlulahlulwe yaba yipolymer, isekethe edibeneyo (IC) kunye nezixhobo ze-photovoltaic, kunye nezakhelo zetsimbi (ukugcinwa kwegesi, i-adsorption, ukugcinwa kunye nokucocwa, ukuva igesi kunye ne-low-k dielectrics, i-catalysis, njl.) .
Ixesha lokuposa: May-12-2022